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Nanofabrication Demonstration Laboratory (NDL) is a new class 10,000 cleanroom at Rm 3114. With this cleanroom facility, the NFF(CWB) can strengthen process training and support outreach activities.
The processes supported by the NDL include photolithography, wet etching, oxidation, physical vapor deposition (PVD) and some basic metrology. We will make use of these process equipment to support PG and UG courses, provide hands-on training to NFF(CWB) “green” users, and to demonstrate fabrication processes to visitors without affecting research activities at other NFF(CWB) laboratories.
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