New Equipment and Process Capabilities
HKUST has been awarded the CRF Collaborative Research Equipment Grant (CREG) from the Research Grant Council in 2020/21, C6002-20EF. The project which purchased a high-accuracy wafer polisher and the bonders for heterogeneous integration is led by Prof. Andrew POON.
NFF(CWB) greatly appreciates the leadership of Prof. POON and the Research Grant Council’s financial support for this project.
New Equipment under Service
The installation of ICP etcher for compound semiconductor and plasma enhanced chemical vapor deposition (PECVD) system were completed in 2022.
Wet-stations upgrade: NFF(CWB) is working on the replacement of all wet-stations over the next several years due to equipment aging. The replacement of wet-station A and wet-station B were completed in 2022. These wet-stations are heavily used by our users for wafer cleaning.
Nanofabrication Demonstration Laboratory
Nanofabrication Demonstration Laboratory (NDL) is a new class 10,000 cleanroom at Rm 3114. With this cleanroom facility, the NFF(CWB) can strengthen process training and support outreach activities.
NFF(CWB) user Qiaoyi WANG’s paper, titled “Replicating 3D printed structures into functional materials,” was published in the Journal of Applied Polymer Science in April 2022. Qiaoyi WANG is supervised by Prof. Hongkai WU.
NFF(CWB) user Sheng NI’s paper, titled “A Sub-nL Chip Calorimeter and its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles,” was published in the Journal of Microelectromechanical Systems in October 2021. Sheng is supervised by Prof. Levent YOBAS.
The NFF(CWB) Team
In January 2022, Mr. Redford MAN and Miss Cherry HO joined the NFF(CWB) team. We would like to take this opportunity to warmly welcome the new staff members.
Events and Activities
The installation of ICP etcher for compound semiconductor and Plasma Enhanced Chemical Vapor Deposition (PECVD) system were completed in 2022. A webinar was arranged with Oxford Instruments Plasma Technology on October 12th, 2022, and over 50 NFF(CWB) users attended the event.