NFF (CWB) Director’s Message
2021 marks the 30th year anniversary of the Nanosystem Fabrication Facility (NFF) at HKUST’s Clear Water Bay (CWB) campus. As a Central Research Facility of The Hong Kong University of Science and Technology (HKUST), NFF (CWB) has trained thousands of research students and staff in the interdisciplinary research areas of micro- and nano-devices and systems over the past three decades.
Many alumni of the “NFF Academy” are now making real impact and becoming leaders in academia and high-tech industries in China and beyond. Going forward, NFF (CWB) will continue to evolve by improving the quality of services and upgrading process capabilities to suit the everchanging and expanding research needs concerning nanofabrication and system integration.
The NFF (CWB) Newsletter serves as a periodical to keep our stakeholders abreast of NFF’s latest developments as well as the achievements of our users and alumni. This issue highlights many recent news and attainments related to NFF (CWB) and our users. On the equipment and process capability front, NFF (CWB) recently installed a new TEOS PECVD to replace a very old PECVD. An ICP etcher enhances compound semiconductor process capability. NFF (CWB) also successfully obtained equipment funding from CRF 2020/21 to acquire equipment for heterogeneous integration. We also celebrated the completion of two 3180 sputtering systems’ re-engineering in collaboration with the Material, Design & Manufacturing Facility (MDMF (CWB)).
I would like to take this opportunity to thank all the former NFF (CWB) directors (Prof. Tai Chin LO, Prof. Philip CHAN, Prof. Johnny SIN, Prof. Mansun CHAN and Prof. Andrew POON) and the entire managing team for building and nurturing the NFF (CWB) into a world-class productive facility that many of our users consider to be home. I look forward to sharing with all of you the many development news of NFF (CWB), as well as the achievements of our users and alumni.
Prof. Kevin J. CHEN (陳敬)
Director of the Nanosystem Fabrication Facility (NFF) at HKUST’s Clear Water Bay (CWB) campus
