I remember coming here thirty some years ago. There was no Microelectronics Fabrication Center (MFC), the predecessor of the Nanosystem Fabrication Facility (NFF). Life felt empty. There would be neither research nor teaching. Non-existence before the Big Bang, meaningless.
Then I remember being given the chance to participate, as a small potato, in the establishment of MFC. I remember going to Montpellier for a factory inspection of the ASM furnaces; Still operating today. What small contribution I made was a most satisfying personal endeavor. Fulfilling.
I remember those early years, in Phase I, working with senior professors from the Institute of Microelectronics of Tsinghua University. All brought with them years of cleanroom experience. Many, perhaps all, have since retired. Yet they are still around, in my mind, no doubt busily microfabricating.
I remember starting ELEC 5080. Those cm-thick final reports immensely impressed the professors from Tsinghua University. Hands on; Practical; Recalled by those who have taken the course.
I remember starting ELEC 5010 jointly with Professor Osamu Tabata of Kyoto University and later expanded with the participation of Professor Xiaohong Wang of Tsinghua University. Seventeen years since its inception; Seven publications from its term projects: JMEMS, MEMS, Transducers, Actuators.
I remember all the little projects I have done with young student colleagues; MEMS, TFT, LTPS, MIUC, IGZO, PV, etc. Through all those years, I am grateful for their tolerance of my occasional outbursts and for everything I have learned from them.
I remember the NFF reunion, organized concurrently with the 25th anniversary of the University. President Tony Chan was puzzled by how a laboratory could produce such a loyal crop of veterans until he realized NFF was like Shaolin Temple, in which many of the students spent the bulk of their UST academic life. Entering green, wild-eyed, and graduating with skills ready to take on whatever challenges thrown their way. Camaraderie formed in the jungle of equipment. Potential surprise lurking around every corner. Small wonder they look back with fond memories of their time spent in NFF.
Like them, and whatever my future coordinates will be in Space and Time, I will always remember NFF and those with whom I have had the privilege to work.
Prof. Man WONG
Professor, Department of Electronic and Computer Engineering
