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The HKUST-logo pin souvenir
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We have initiated the design and fabrication of a pin bearing the HKUST logo on a silicon chip as a souvenir for distinguished visitors to the NFF. The logo has been approved by the VPIAO.
The fabrication process is designed and carried out by the NFF team. The pattern is realized by the following micro-fabrication process steps: silicon thermal oxidation, photolithography, metal sputtering, atomic layer deposition (ALD), inductively coupled plasma (ICP) dry etch, etc.