New Equipment under Service

The Hitachi tabletop SEM TM4000plus was made available to NFF (CWB) users for operation in March 2024. It integrates ease of use, optimized imaging, and high image quality, making this equipment well-received by lab users.

Hitachi Tabletop SEM TM4000plus

Oxford PlasmaPro 100 Cobra

The Oxford PlasmaPro 100 Cobra etching system has been delivered to the NFF (CWB) Phase 2 lab this year. The equipment facilities have been installed, and it is now awaiting the engineer to power on the system and conduct the on-site acceptance test. The schedule for releasing the equipment for operation is set for the first quarter of 2025.

Another advanced and high-grade SEM, the Hitachi FE-SEM SU8600, has also been made available for user operation in November 2024. Compared to the older SEM, it offers ultrahigh resolution and advanced automation. We expect this equipment will be highly beneficial to lab users from different departments.

Hitachi FE-SEM SU8600

The SEM images showing different magnifications: (a) 4,500x

(b) 20,000x

(c) 110,000x

Heidelberg µMLA table-top maskless writer

The Heidelberg µMLA table-top maskless writer was installed in November 2024 and is currently undergoing testing by engineers as part of the acceptance process. We expect to release the equipment for operation in 2025.

Wet-station E for resist stripping and HF etching

The replacement work for wet-stations C, D, E, and F has recently been completed, and they are now in service. The new wet stations feature automatic doors designed to enhance exhaust efficiency and serve as equipment locks for users to check in their equipment.